Ellipsometer

Tera Evalutor THz Time-Domain Ellipsometer

Spectroscopic Ellipsometer is widely used for thin film analysis and measurements. Holmarc s spectroscopic ellipsometer incorporates Rotating Analyzer Ellipsometry technology to characterize thin film samples. It uses a high speed CCD array detection to collect the entire spectrum. It measures films from nanometer thickness up to tens of microns and the optical properties from transparent to absorbing materials. It accurately measures optical constants like refractive index, film thickness and extinction coefficient. Our standard system comes with Quartz-Halogen lamp for visible through IR range. Our spectroscopic ellipsometer software allows the user to measure and analyze multilayer thin films and complex thin film structures. An autocollimator, Z stage and tilt platforms are provided for sample alignment. XY motorized stage and motorized rotation stages are provided as unoptional feature for mapping thin film uniformity.

Its main purpose is to characterize the critical physical,optical, and electronic properties of the thin-filmmultilayer structures that make up a solar cell. Byprecisely measuring these properties

Ellipsometer is a non-contact, non-destructive and high sensitive optical approach for characterization the structural and physical properties of thin film in the order of nanometer scale, which based on the light polarization change before and after reflection upon the sample surface and interface. REMPro is a multiple angle laser ellipsometer, which is applied for measurement the film parameters on the smooth substrate. It provides the film thickness and optical constants at the He-Ne laser wavelength 632.8 nm with an extraordinary precision and accuracy. The REMPro can be utilized to characterize single films, multiple layer stacks (1~3 layer) and bulk materials (substrates). Due to its modern, easy to use, recipe oriented and robust software, the REMPro fits the requirements of R&D as well as of quality control in production environments. It covers a large variety of applications like microelectronics, semiconductors, biology and life science, display technology and much more. High sensitivity over theentire , plane and ultra-low noise detection allow for measuring even non-ideal, stray light causing, rough surfaces as e.g. solar cells. The REMPro is designed to tap the full potential of the method ellipsometry and to push the limits. The core concept of the REMPro with highly phase stabilized compensator, computer controlled frequency stabilized rotating compensator and two-zone averaging method allows for the measurement of ultra thin films and surface roughness on almost any kind of absorbing or transparent substrate with a flat, mirror - like surface. The REMPro comprises a manual goniometer with superior performance and angle accuracy to perform fast variable angle measurements for more complex samples. The REMPro is a compact instrument, quickly up and running, it is controlled by state of the art PC.

The SpecEl-2000 is part of the line of thin _ lm metrology systems. The SpecEl-2000 is a user-friendly,bench-top thin film measurement system utilizing spectroscopic ellipsometry. Ideal for flat, multi-layer, Semi-transparent samples such as wafers or glass plates. The Spec-El-2000 is designed to be affordable, compact and convenient, with easy placement of the sample and one button operation. SPECEL-2000-VIS-NIRWavelength 450-1000 nm, thickness 1nm...10 m, resolution 0.1 nm, analyzer for refractive index (n) and extinction coefficients (k) as a function of wavelength, measurement speed 3-10 seconds, repeatability 70 nm SiO2 on Si: 1 , controller unit included. SPECEL-2000-UV-VIS-NIR Wavelength 300-1000 nm, thickness 1nm...10 m, resolution 0.1 nm, analyzer for refractive index (n) and extinction coefficients (k) as a function of wavelength, measurement speed 3-10 seconds, repeatability 70 nm SiO2 on Si: 1 , controller unit included.

The J. A. Woollam Co. is a manufacturer of spectroscopic ellipsometers for non-destructive thin film and bulk material characterization. Spectroscopic ellipsometry (SE) has become the standard for measuring thin film thickness and optical constants (n and k). Spectroscopic ellipsometry is used for characterization of all types of materials: dielectrics, semiconductors, metals, organics, and more. We offer ellipsometers covering a spectral range to meet any need (from the vacuum UV to the far IR). Many upgrade options are available with our ellipsometers: automated sample translation, variable temperature (heating or cooling), focusing optics, liquid cells, etc

Elipsometer

Spectroscopic ellipsometers

Spectroscopic Ellipsometer SE series are advanced models built by Angstrom Sun Technologies Inc. These system have advantages over reflectometers due to its capability to acquire more set of polarization information at different incident angles spectroscopically. User can select two different data acquisition mode, scanning wavelength by wavelength detecting mode or array based fast detecting mode

R&D Spectroscopic Ellipsometers, UV-VIS IR(160 mm-20 ) High Resolution Monochromators, Double Spectrometers Grazing X-ray Reflectometry. Porositymetry. .

Ellipsometer

Fully Integrated Spectroscopic Ellipsometer Configuration

Ellipsometer

Imaging Ellipsometer

Ellipsometer Reflectometer

Elipsometer

Ellipsometer